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题名:
A Method to Evaluate Error Correction Ability of Computer Controlled Optical Surfacing Process
作者: Wang, Jia1,2; Fan, Bin1; Wan, Yongjian1,3; Shi, Chunyan1; Zhuo, Bin1
刊名: OPTICAL REVIEW
出版日期: 2014-05-01
卷号: 21, 期号:3, 页码:280-285
关键词: CCOS process ; power spectral density ; convolution model ; spatial frequency domain
文章类型: Article
英文摘要: Quantitatively investigating error correction ability in frequency domain is important for computer controlled optical surfacing (CCOS) process to correct different spatial frequency errors. Based on the mathematical model coherence between filtering and material removal process of CCOS, a method is proposed to quantitatively evaluate the correction ability of CCOS process. A generalized model named normalized smoothing spectral function (SSF) will be established combine convolution model of CCOS and power spectral density (PSD) function. A set of polishing experiments are performed to calculate SSF curves and validate SSF model. By comparing the results of SSF curve with PSD curve and surface figure, it reveals that SSF curve can quantitatively indicate the correction ability of CCOS process for different spatial frequency errors. (C) 2014 The Japan Society of Applied Physics
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: TOOLS ; MODEL
收录类别: SCI
语种: 英语
WOS记录号: WOS:000344640900015
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/2414
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China
3.State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China

Recommended Citation:
Wang, Jia,Fan, Bin,Wan, Yongjian,et al. A Method to Evaluate Error Correction Ability of Computer Controlled Optical Surfacing Process[J]. OPTICAL REVIEW,2014,21(3):280-285.
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