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A Method to Evaluate Error Correction Ability of Computer Controlled Optical Surfacing Process
Wang, Jia1,2; Fan, Bin1; Wan, Yongjian1,3; Shi, Chunyan1; Zhuo, Bin1
Source PublicationOPTICAL REVIEW
Volume21Issue:3Pages:280-285
2014-05-01
Language英语
Indexed BySCI
WOS IDWOS:000344640900015
SubtypeArticle
AbstractQuantitatively investigating error correction ability in frequency domain is important for computer controlled optical surfacing (CCOS) process to correct different spatial frequency errors. Based on the mathematical model coherence between filtering and material removal process of CCOS, a method is proposed to quantitatively evaluate the correction ability of CCOS process. A generalized model named normalized smoothing spectral function (SSF) will be established combine convolution model of CCOS and power spectral density (PSD) function. A set of polishing experiments are performed to calculate SSF curves and validate SSF model. By comparing the results of SSF curve with PSD curve and surface figure, it reveals that SSF curve can quantitatively indicate the correction ability of CCOS process for different spatial frequency errors. (C) 2014 The Japan Society of Applied Physics
KeywordCcos Process Power Spectral Density Convolution Model Spatial Frequency Domain
WOS KeywordTOOLS ; MODEL
WOS Research AreaOptics
WOS SubjectOptics
Citation statistics
Cited Times:2[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/2414
Collection光电技术研究所被WoS收录文章
Affiliation1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China
3.State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China
Recommended Citation
GB/T 7714
Wang, Jia,Fan, Bin,Wan, Yongjian,et al. A Method to Evaluate Error Correction Ability of Computer Controlled Optical Surfacing Process[J]. OPTICAL REVIEW,2014,21(3):280-285.
APA Wang, Jia,Fan, Bin,Wan, Yongjian,Shi, Chunyan,&Zhuo, Bin.(2014).A Method to Evaluate Error Correction Ability of Computer Controlled Optical Surfacing Process.OPTICAL REVIEW,21(3),280-285.
MLA Wang, Jia,et al."A Method to Evaluate Error Correction Ability of Computer Controlled Optical Surfacing Process".OPTICAL REVIEW 21.3(2014):280-285.
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