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Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems
Liu, Cunding1; Kong, Mingdong1; Guo, Chun1,2; Gao, Weidong1; Li, Bincheng1
Source PublicationOPTICS EXPRESS
Volume20Issue:21Pages:23790-23797
2012-10-08
Language英语
Indexed BySCI
WOS IDWOS:000309955100084
SubtypeArticle
AbstractA straightforward theoretical routine is proposed to design shadowing masks which are used for preparing uniform coatings on flat as well as strongly curved spherical substrates with large diameters in planetary rotation system. By approximating a spherical substrate in planetary rotation to a corresponding flat substrate in simple rotation around the revolution axis, the initial shape of a shadowing mask is determined. The desired uniformity for the spherical substrate is further realized through expanding appropriately the arc length of the initial shadowing mask. Utilizing the shadowing masks designed with the theoretical routine, film uniformities better than 97% are experimentally achieved for large-diameter spherical substrates with ratios of clear aperture to radius of curvature range from approximately -1.0 to 1.3. (C) 2012 Optical Society of America
WOS KeywordTHICKNESS UNIFORMITY ; FILM THICKNESS ; OPTIMIZATION ; VACUUM
WOS Research AreaOptics
WOS SubjectOptics
Citation statistics
Cited Times:21[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/2385
Collection光电技术研究所被WoS收录文章
Affiliation1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
Recommended Citation
GB/T 7714
Liu, Cunding,Kong, Mingdong,Guo, Chun,et al. Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems[J]. OPTICS EXPRESS,2012,20(21):23790-23797.
APA Liu, Cunding,Kong, Mingdong,Guo, Chun,Gao, Weidong,&Li, Bincheng.(2012).Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems.OPTICS EXPRESS,20(21),23790-23797.
MLA Liu, Cunding,et al."Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems".OPTICS EXPRESS 20.21(2012):23790-23797.
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