中国科学院光电技术研究所机构知识库
Advanced  
IOE OpenIR  > 光电技术研究所被WoS收录文章  > 期刊论文
题名:
Method to test rotationally asymmetric surface deviation with high accuracy
作者: Song, Weihong1,2; Wu, Fan1; Hou, Xi1
刊名: APPLIED OPTICS
出版日期: 2012-08-01
卷号: 51, 期号:22, 页码:5567-5572
文章类型: Article
英文摘要: We have proposed a new absolute method to test rotationally asymmetric surface deviation. Relying on the high accuracy of Zernike polynomial fitting with least-squares algorithm for the low-frequency component and preserving the high-frequency component with the averaging method, the new method can guarantee the high accuracy of the measurement result with fewer rotational measurements compared to the traditional multiangle averaging method. It realizes a balance between the accuracy and efficiency of the measurements. It has been verified by experiments; the root mean square (rms) of residual figure between the two methods is similar to 0.6 nm. Meanwhile, the new method can suppress environmental noise introduced in measurement results well. (C) 2012 Optical Society of America
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
收录类别: SCI
语种: 英语
WOS记录号: WOS:000307160600028
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/2376
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

Files in This Item:

There are no files associated with this item.


作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Chinese Acad Sci, Grad Univ, Beijing 100039, Peoples R China

Recommended Citation:
Song, Weihong,Wu, Fan,Hou, Xi. Method to test rotationally asymmetric surface deviation with high accuracy[J]. APPLIED OPTICS,2012,51(22):5567-5572.
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Song, Weihong]'s Articles
[Wu, Fan]'s Articles
[Hou, Xi]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Song, Weihong]‘s Articles
[Wu, Fan]‘s Articles
[Hou, Xi]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2016  中国科学院光电技术研究所 - Feedback
Powered by CSpace