中国科学院光电技术研究所机构知识库
Advanced  
IOE OpenIR  > 光电技术研究所被WoS收录文章  > 期刊论文
题名:
Research of subwavelength grating based on multilayer films structure
作者: Liang Gao-Feng1,2; Zhao Qing1; Chen Xin1,2; Wang Chang-Tao2; Zhao Ze-Yu2; Luo Xian-Gang2
刊名: ACTA PHYSICA SINICA
出版日期: 2012-05-01
卷号: 61, 期号:10
关键词: suface plasmon ; super-resolution imaging ; nanolithography technique
文章类型: Article
英文摘要: Based on the theory of suface plasmon resonance and the special nano-optical effect of metal-dielectric composite, we study super-resolution photolithography using multilayer films. The main point is to use 365 nm exposal light to realize super-resolution imaging by using a mask with a period of 230 nm and linewidth of 100 nm. We discuss the selection of the parameters multi-film with equal thickness, and achieve a sufficient contrast and high intensity through numerical simulation, then verify the obtained results by the plasmon nanolithography technique. Choosing the best scheme, we achieve large-area super-resolution images with the subwavelength structure.
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Physics, Multidisciplinary
研究领域[WOS]: Physics
关键词[WOS]: SILVER SUPERLENS ; PERFECT LENS ; REFRACTION
收录类别: SCI
语种: 英语
WOS记录号: WOS:000304976200025
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/2358
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

Files in This Item:

There are no files associated with this item.


作者单位: 1.Univ Elect Sci & Technol China, Sch Phys Elect, Chengdu 610054, Peoples R China
2.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China

Recommended Citation:
Liang Gao-Feng,Zhao Qing,Chen Xin,et al. Research of subwavelength grating based on multilayer films structure[J]. ACTA PHYSICA SINICA,2012,61(10).
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Liang Gao-Feng]'s Articles
[Zhao Qing]'s Articles
[Chen Xin]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Liang Gao-Feng]‘s Articles
[Zhao Qing]‘s Articles
[Chen Xin]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2016  中国科学院光电技术研究所 - Feedback
Powered by CSpace