IOE OpenIR  > 光电技术研究所被WoS收录文章
Research of subwavelength grating based on multilayer films structure
Liang Gao-Feng1,2; Zhao Qing1; Chen Xin1,2; Wang Chang-Tao2; Zhao Ze-Yu2; Luo Xian-Gang2
Source PublicationACTA PHYSICA SINICA
Volume61Issue:10
2012-05-01
Language英语
Indexed BySCI
WOS IDWOS:000304976200025
SubtypeArticle
AbstractBased on the theory of suface plasmon resonance and the special nano-optical effect of metal-dielectric composite, we study super-resolution photolithography using multilayer films. The main point is to use 365 nm exposal light to realize super-resolution imaging by using a mask with a period of 230 nm and linewidth of 100 nm. We discuss the selection of the parameters multi-film with equal thickness, and achieve a sufficient contrast and high intensity through numerical simulation, then verify the obtained results by the plasmon nanolithography technique. Choosing the best scheme, we achieve large-area super-resolution images with the subwavelength structure.
KeywordSuface Plasmon Super-resolution Imaging Nanolithography Technique
WOS KeywordSILVER SUPERLENS ; PERFECT LENS ; REFRACTION
WOS Research AreaPhysics
WOS SubjectPhysics, Multidisciplinary
Citation statistics
Cited Times:4[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/2358
Collection光电技术研究所被WoS收录文章
Affiliation1.Univ Elect Sci & Technol China, Sch Phys Elect, Chengdu 610054, Peoples R China
2.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China
Recommended Citation
GB/T 7714
Liang Gao-Feng,Zhao Qing,Chen Xin,et al. Research of subwavelength grating based on multilayer films structure[J]. ACTA PHYSICA SINICA,2012,61(10).
APA Liang Gao-Feng,Zhao Qing,Chen Xin,Wang Chang-Tao,Zhao Ze-Yu,&Luo Xian-Gang.(2012).Research of subwavelength grating based on multilayer films structure.ACTA PHYSICA SINICA,61(10).
MLA Liang Gao-Feng,et al."Research of subwavelength grating based on multilayer films structure".ACTA PHYSICA SINICA 61.10(2012).
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