Knowledge Management System Of Institute of optics and electronics, CAS
| Research of subwavelength grating based on multilayer films structure | |
| Liang Gao-Feng1,2; Zhao Qing1; Chen Xin1,2; Wang Chang-Tao2; Zhao Ze-Yu2; Luo Xian-Gang2 | |
| Source Publication | ACTA PHYSICA SINICA
 |
| Volume | 61Issue:10 |
| 2012-05-01 | |
| Language | 英语 |
| Indexed By | SCI |
| WOS ID | WOS:000304976200025 |
| Subtype | Article |
| Abstract | Based on the theory of suface plasmon resonance and the special nano-optical effect of metal-dielectric composite, we study super-resolution photolithography using multilayer films. The main point is to use 365 nm exposal light to realize super-resolution imaging by using a mask with a period of 230 nm and linewidth of 100 nm. We discuss the selection of the parameters multi-film with equal thickness, and achieve a sufficient contrast and high intensity through numerical simulation, then verify the obtained results by the plasmon nanolithography technique. Choosing the best scheme, we achieve large-area super-resolution images with the subwavelength structure. |
| Keyword | Suface Plasmon Super-resolution Imaging Nanolithography Technique |
| WOS Keyword | SILVER SUPERLENS ; PERFECT LENS ; REFRACTION |
| WOS Research Area | Physics |
| WOS Subject | Physics, Multidisciplinary |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/2358 |
| Collection | 光电技术研究所被WoS收录文章 |
| Affiliation | 1.Univ Elect Sci & Technol China, Sch Phys Elect, Chengdu 610054, Peoples R China 2.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China |
| Recommended Citation GB/T 7714 | Liang Gao-Feng,Zhao Qing,Chen Xin,et al. Research of subwavelength grating based on multilayer films structure[J]. ACTA PHYSICA SINICA,2012,61(10). |
| APA | Liang Gao-Feng,Zhao Qing,Chen Xin,Wang Chang-Tao,Zhao Ze-Yu,&Luo Xian-Gang.(2012).Research of subwavelength grating based on multilayer films structure.ACTA PHYSICA SINICA,61(10). |
| MLA | Liang Gao-Feng,et al."Research of subwavelength grating based on multilayer films structure".ACTA PHYSICA SINICA 61.10(2012). |
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