A truncated hyperlens composed of pairs of metal-dielectric cylindrical multilayers is proposed to demagnify the diffraction limited spot to achieve deep subwavelength imaging. The diffraction limited spot is focused by far field converging cylindrical wave. Numerical simulations demonstrate that full width at half maximum (FWHM) of the image down to 32 nm (similar to lambda/11) can be achieved from object (similar to lambda/3) by 365 nm light illumination. It is discussed that the influence of size and focusing shift of the spot on those of the demagnification image on photoresist. It is also demonstrated that multi-objects can be demagnified and projected on the photoresist. (C) 2012 Elsevier Ltd. All rights reserved.
Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, Chengdu 610209, Peoples R China
Yao, Na,Wang, Changtao,Ren, Guowei,et al. Demagnifying far field focusing spot to deep subwavelength scale by truncated hyperlens for nanolithography[J]. SUPERLATTICES AND MICROSTRUCTURES,2012,52(1):63-69.