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题名:
A multi-electrode and pre-deformed bilayer spring structure electrostatic attractive MEMS actuator with large stroke at low actuation voltage
作者: Hu, Fangrong1; Li, Zhi1; Qian, Yixian2; Yao, Jun3; Xiong, Xianming1; Niu, Junhao1; Peng, Zhiyong1
刊名: JOURNAL OF MICROMECHANICS AND MICROENGINEERING
出版日期: 2012-09-01
卷号: 22, 期号:9
文章类型: Article
英文摘要: This paper presents a multi-electrode and pre-deformed bilayer spring structure electrostatic attractive microelectromechanical systems (MEMS) actuator; it has large stroke at relatively low actuation voltage. Generally, electrostatic-attractive-force-based actuators have small stroke due to the instability resulted from the electrostatic 'pull-in' phenomenon. However, in many applications, the electrostatic micro-actuator with large stroke at low voltage is more preferred. By introducing a multi-electrode and a pre-deformed bilayer spring structure, an electrostatic attractive MEMS actuator with large stroke at very low actuation voltage has been successfully demonstrated in this paper. The actuator contains a central plate with a size of 300 mu m x 300 mu m x 1.5 mu m and it is supported by four L-shaped bilayer springs which are pre-deformed due to residual stresses. Each bilayer spring is simultaneously attracted by three adjacent fixed electrodes, and the factors affecting the electrostatic attractive force are analyzed by a finite element analysis method. The prototype of the actuator is fabricated by poly-multi-user-MEMS-process (PolyMUMP) and the static performance is tested using a white light interferometer. The measured stroke of the actuator reaches 2 mu m at 13 V dc, and it shows a good agreement with the simulation.
WOS标题词: Science & Technology ; Technology
类目[WOS]: Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Materials Science, Multidisciplinary ; Mechanics
研究领域[WOS]: Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Materials Science ; Mechanics
关键词[WOS]: VARIABLE INDUCTOR ; ADAPTIVE OPTICS ; IN INSTABILITY ; DESIGN ; FABRICATION ; MICROMIRRORS ; TRAVEL ; RANGE ; ARRAY
收录类别: SCI
语种: 英语
WOS记录号: WOS:000308210600033
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/2340
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Guilin Univ Elect Technol, Coll Elect Engn & Automatizat, Guilin 541004, Peoples R China
2.Zhejiang Normal Univ, Inst Informat Opt, Jinhua 321004, Peoples R China
3.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China

Recommended Citation:
Hu, Fangrong,Li, Zhi,Qian, Yixian,et al. A multi-electrode and pre-deformed bilayer spring structure electrostatic attractive MEMS actuator with large stroke at low actuation voltage[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2012,22(9).
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