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激光平面度仪的研究
杨文志; 景洪伟; 曹学东
Source Publication红外与激光工程
Volume37Issue:zPages:144
2008
Language中文
ISSN1007-2276
Indexed By其他
Subtype期刊论文
Abstract针对大型环形平面尤其是非连续平面(带孔、有槽、中间有凸台子、中间间断、异形平面)平面度的检测,研制了一种新型测量设备—激光平面度仪。该仪器采用了激器、五棱镜与转台组合产生基准平面,以PSD作为探测器;通过测量被测点与基准面的高度差获取平面度数据。该仪器的测量不确度为4.6μm。
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/2102
Collection质量处(质检中心)
Recommended Citation
GB/T 7714
杨文志,景洪伟,曹学东. 激光平面度仪的研究[J]. 红外与激光工程,2008,37(z):144.
APA 杨文志,景洪伟,&曹学东.(2008).激光平面度仪的研究.红外与激光工程,37(z),144.
MLA 杨文志,et al."激光平面度仪的研究".红外与激光工程 37.z(2008):144.
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