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自支撑Cu/Zr纳米多层膜的制备研究
苑永涛; 方敬忠; 刘红; 陈志强
Source Publication光学仪器
Issue6Pages:82-85
2008
Language中文
ISSN1005-5630
Indexed By其他
Subtype期刊论文
Abstract自支撑纳米多层膜可用作轻型反射镜面材料,自支撑薄膜的制备技术是目前应用中存在的主要问题之一.利用磁控溅射方法在抛光石英玻璃基片上复制了直径70mm厚约100μm自支撑Cu/Zr纳米多层膜,使用显微硬度计、表面轮廓仪分析了自支撑薄膜的力学性能和表面粗糙度.研究结果表明:自支撑Cu/Zr纳米多层膜面密度0.5kg/m2,显微硬度5.7GPa,屈服强度1562MPa,复制面表面粗糙度1.33~1.93nm.复制的自支撑薄膜具有优异的力学及表面性能.
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/2094
Collection轻量化中心
Recommended Citation
GB/T 7714
苑永涛,方敬忠,刘红,等. 自支撑Cu/Zr纳米多层膜的制备研究[J]. 光学仪器,2008(6):82-85.
APA 苑永涛,方敬忠,刘红,&陈志强.(2008).自支撑Cu/Zr纳米多层膜的制备研究.光学仪器(6),82-85.
MLA 苑永涛,et al."自支撑Cu/Zr纳米多层膜的制备研究".光学仪器 .6(2008):82-85.
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