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题名:
Accuracy analysis for the determination of electronic transport properties of Si wafers using modulated free carrier absorption
作者: Xiren Zhang ; Bincheng Li ; Xianming Liu
刊名: Journal of Applied Physics
出版日期: 2008
卷号: 103, 期号:104, 页码:107305, 1-7
学科分类: 光学薄膜技术
文章类型: 期刊论文
中文摘要: Computer simulations are carried out to investigate the sensitivity of simultaneous determination of three electronic transport properties (carrier lifetime, carrier diffusivity, and front surface recombination velocity) of silicon wafers by modulated free carrier absorption (MFCA) via a multiparameter fitting procedure. The relative accuracy of the transport parameter determination by laterally resolved MFCA (LR-MFCA), in which the amplitude and phase are measured as functions of the pump-probe-beam separation at several modulation frequencies covering an appropriate range, and by conventional frequency-scan MFCA (FS-MFCA), in which only the modulation frequency dependences of the amplitude and phase are recorded, is theoretically analyzed and experimentally estimated by calculating the dependence of the mean square variance on individual transport parameter via a multiparameter estimation process. Simulated and experimental results show that the determination of the transport properties of silicon wafers by LR-MFCA are more accurate, compared with that by FS-MFCA. Comparative experiments are performed with a silicon wafer and the estimated uncertainties of the carrier diffusivity; lifetime and front surface recombination velocity are approximately ±3.7%, ±25%, and ±35% for LR-MFCA and ±7.5%, ±31%, and ±24% for FS-MFCA, respectively.
收录类别: SCI ; Ei
语种: 英语
ISSN号: 0021-8979
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/2073
Appears in Collections:薄膜光学技术研究室(十一室)_期刊论文

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Recommended Citation:
Xiren Zhang,Bincheng Li,Xianming Liu. Accuracy analysis for the determination of electronic transport properties of Si wafers using modulated free carrier absorption[J]. Journal of Applied Physics,2008,103(104):107305, 1-7.
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