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基于PZT的非球面能动抛光盘定位误差分析
胡自强; 凌宁; 潘君骅
Source Publication光学精密工程
Volume16Issue:9Pages:1577-1581
2008
Language中文
ISSN1004-924X
Indexed ByEi
Subtype期刊论文
Abstract研制了一个口径为100mm、含19个PZT驱动器的非球面能动抛光磨盘,用于加工口径为350mm、k=1.112155、顶点半径为840mm的双曲面镜。为研究定位误差对非球面能动抛光磨盘输出面形精度的影响,对磨盘上任意点所需变形量占以及由定位误差引入的变形量误差△δ进行了理论公式推导,并利用有限元分析方法计算得到了当非球面能动抛光磨盘中心到非球面工件中心的距离L为120mm且δL分别为0,-1.0,-0.5,0.5,1mm时,非球面能动抛光磨盘输出面形与理论面形比较剩余残差RMS相应分别为0.329,0.454,0.366,0.367,0.461μm,定位误差导致剩余残差RMS分别相应增加0.38%,10.9%,11.2%,40%。因此,定位误差应该控制在±0.5mm以内。[
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/1979
Collection自适应光学技术研究室(八室)
Recommended Citation
GB/T 7714
胡自强,凌宁,潘君骅. 基于PZT的非球面能动抛光盘定位误差分析[J]. 光学精密工程,2008,16(9):1577-1581.
APA 胡自强,凌宁,&潘君骅.(2008).基于PZT的非球面能动抛光盘定位误差分析.光学精密工程,16(9),1577-1581.
MLA 胡自强,et al."基于PZT的非球面能动抛光盘定位误差分析".光学精密工程 16.9(2008):1577-1581.
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