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题名:
Nanofabrication with controllable localization energy based on the interference modulation of surface plasmons
作者: Wei, XZ (Wei, Xingzhan) ; Du, CL (Du, Chunlei) ; Dong, XC (Dong, Xiaochun) ; Luo, XG (Luo, Xiangang) ; Deng, QL (Deng, Qiling) ; Zhang, YD (Zhang, Yudong)
刊名: OPTICS EXPRESS
出版日期: 2008
卷号: 16, 期号:19, 页码:14404-14410 SEP 15
文章类型: 期刊论文
中文摘要: A nanolithography technique based on the interference of surface plasmons (SPs) is proposed and demonstrated to modulate the localized exposure energy. The SP waves participating in interference are excited by two distinct structures, namely, the grating
收录类别: SCI ; Ei
语种: 英语
ISSN号: 1094-4102
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/1939
Appears in Collections:微电子装备总体研究室(四室微光学) _期刊论文

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Recommended Citation:
Wei, XZ ,Du, CL ,Dong, XC ,et al. Nanofabrication with controllable localization energy based on the interference modulation of surface plasmons[J]. OPTICS EXPRESS,2008,16(19):14404-14410 SEP 15.
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