题名: Superlens nano-patterning technology based on the distributed Polystyrene spheres
作者: Li, SH (Li, Shuhong)
; Du, CL (Du, Chunlei)
; Dong, XC (Dong, Xiaochun)
; Shi, LF (Shi, Lifang)
; Luo, XG (Luo, Xiangang)
; Wei, XZ (Wei, Xingzhan)
; Zhang, YD (Zhang, Yudong)
刊名: OPTICS EXPRESS
出版日期: 2008
卷号: 16, 期号: 19, 页码: 14397-14403 SEP 15 文章类型: 期刊论文
中文摘要: Based on surface plasmon resonant enhancement, a method to realize photolithography beyond diffraction limit by using polystyrene spheres (PSs) self-assembled on silver slab was proposed in this paper. The optimum parameters for PS with different diameter 收录类别: SCI
; Ei
语种: 英语
ISSN号: 1094-4090
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/1935
Appears in Collections: 微电子装备总体研究室（四室微光学） _期刊论文
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Recommended Citation:
Li, SH ,Du, CL ,Dong, XC ,et al. Superlens nano-patterning technology based on the distributed Polystyrene spheres[J]. OPTICS EXPRESS,2008,16(19):14397-14403 SEP 15.
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