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题名:
Micro-optical devices formed by a dynamic photolithographic approach
作者: Du, CL ; Dong, XC ; Deng, QL ; et al.
刊名: JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS
出版日期: 2008
卷号: 10, 期号:6, 页码:Art. No. 064007 JUN
文章类型: 期刊论文
中文摘要: We outline a unique photolithographic approach, by employing both periodic and aperiodic binary moving masks, that is developed for forming micro-optical structures effectively with a continuous profile. The mechanism for forming different micro-optical profiles is disclosed, and the designed approach for a binary moving mask is described. Finally, concrete micro-optical devices with continuous microprofiles, including a microlens array with different sub-apertures and an irregular distributed phase plate, are demonstrated and evaluated.
收录类别: SCI ; Ei
语种: 英语
ISSN号: 1464-4258
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/1933
Appears in Collections:微电子装备总体研究室(四室微光学) _期刊论文

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Recommended Citation:
Du, CL,Dong, XC,Deng, QL,et al. Micro-optical devices formed by a dynamic photolithographic approach[J]. JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS,2008,10(6):Art. No. 064007 JUN.
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文件名: 2008-230.pdf
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