Micro-optical devices formed by a dynamic photolithographic approach | |
Du, CL; Dong, XC; Deng, QL; et al. | |
Source Publication | JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS
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Volume | 10Issue:6Pages:Art. No. 064007 JUN |
2008 | |
Language | 英语 |
ISSN | 1464-4258 |
Indexed By | SCI ; Ei |
Subtype | 期刊论文 |
Abstract | We outline a unique photolithographic approach, by employing both periodic and aperiodic binary moving masks, that is developed for forming micro-optical structures effectively with a continuous profile. The mechanism for forming different micro-optical profiles is disclosed, and the designed approach for a binary moving mask is described. Finally, concrete micro-optical devices with continuous microprofiles, including a microlens array with different sub-apertures and an irregular distributed phase plate, are demonstrated and evaluated. |
Document Type | 期刊论文 |
Identifier | http://ir.ioe.ac.cn/handle/181551/1933 |
Collection | 微电子装备总体研究室(四室微光学) |
Recommended Citation GB/T 7714 | Du, CL,Dong, XC,Deng, QL,et al. Micro-optical devices formed by a dynamic photolithographic approach[J]. JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS,2008,10(6):Art. No. 064007 JUN. |
APA | Du, CL,Dong, XC,Deng, QL,&et al..(2008).Micro-optical devices formed by a dynamic photolithographic approach.JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS,10(6),Art. No. 064007 JUN. |
MLA | Du, CL,et al."Micro-optical devices formed by a dynamic photolithographic approach".JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS 10.6(2008):Art. No. 064007 JUN. |
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