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Micro-optical devices formed by a dynamic photolithographic approach
Du, CL; Dong, XC; Deng, QL; et al.
Source PublicationJOURNAL OF OPTICS A-PURE AND APPLIED OPTICS
Volume10Issue:6Pages:Art. No. 064007 JUN
2008
Language英语
ISSN1464-4258
Indexed BySCI ; Ei
Subtype期刊论文
AbstractWe outline a unique photolithographic approach, by employing both periodic and aperiodic binary moving masks, that is developed for forming micro-optical structures effectively with a continuous profile. The mechanism for forming different micro-optical profiles is disclosed, and the designed approach for a binary moving mask is described. Finally, concrete micro-optical devices with continuous microprofiles, including a microlens array with different sub-apertures and an irregular distributed phase plate, are demonstrated and evaluated.
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/1933
Collection微电子装备总体研究室(四室微光学)
Recommended Citation
GB/T 7714
Du, CL,Dong, XC,Deng, QL,et al. Micro-optical devices formed by a dynamic photolithographic approach[J]. JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS,2008,10(6):Art. No. 064007 JUN.
APA Du, CL,Dong, XC,Deng, QL,&et al..(2008).Micro-optical devices formed by a dynamic photolithographic approach.JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS,10(6),Art. No. 064007 JUN.
MLA Du, CL,et al."Micro-optical devices formed by a dynamic photolithographic approach".JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS 10.6(2008):Art. No. 064007 JUN.
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