| Micro-optical devices formed by a dynamic photolithographic approach | |
| Du, CL; Dong, XC; Deng, QL; et al. | |
| Source Publication | JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS
 |
| Volume | 10Issue:6Pages:Art. No. 064007 JUN |
| 2008 | |
| Language | 英语 |
| ISSN | 1464-4258 |
| Indexed By | SCI ; Ei |
| Subtype | 期刊论文 |
| Abstract | We outline a unique photolithographic approach, by employing both periodic and aperiodic binary moving masks, that is developed for forming micro-optical structures effectively with a continuous profile. The mechanism for forming different micro-optical profiles is disclosed, and the designed approach for a binary moving mask is described. Finally, concrete micro-optical devices with continuous microprofiles, including a microlens array with different sub-apertures and an irregular distributed phase plate, are demonstrated and evaluated. |
| Document Type | 期刊论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/1933 |
| Collection | 微电子装备总体研究室（四室微光学） |
| Recommended Citation GB/T 7714 | Du, CL,Dong, XC,Deng, QL,et al. Micro-optical devices formed by a dynamic photolithographic approach[J]. JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS,2008,10(6):Art. No. 064007 JUN. |
| APA | Du, CL,Dong, XC,Deng, QL,&et al..(2008).Micro-optical devices formed by a dynamic photolithographic approach.JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS,10(6),Art. No. 064007 JUN. |
| MLA | Du, CL,et al."Micro-optical devices formed by a dynamic photolithographic approach".JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS 10.6(2008):Art. No. 064007 JUN. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2008-230.pdf（944KB） | 开放获取 | CC BY-NC-ND | View Application Full Text | |||
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