中国科学院光电技术研究所机构知识库
Advanced  
IOE OpenIR  > 微电子装备总体研究室(四室)  > 期刊论文
题名:
Fourier-based analysis of moire fringe patterns of superposed gratings in alignment of nanolithography
作者: Zhou, SL (Zhou, Shaolin) ; Fu, YQ (Fu, Yongqi) ; Tang, XP (Tang, Xiaoping) ; Hu, S (Hu, Song) ; Chen, WF (Chen, Wangfu) ; Yang, Y (Yang, Yong)
刊名: OPTICS EXPRESS
出版日期: 2008
卷号: 16, 期号:11, 页码:7869-7880 MAY 26
文章类型: 期刊论文
中文摘要: Considering the necessity of alignment in practical applications of photolithography, distribution of complex amplitude of moire fringe patterns that are produced in superposition of two gratings is analyzed in the viewpoint of Fourier Optics and the rela
收录类别: SCI ; Ei
语种: 英语
ISSN号: 1094-4109
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/1916
Appears in Collections:微电子装备总体研究室(四室)_期刊论文

Files in This Item:
File Name/ File Size Content Type Version Access License
2008-210.pdf(512KB)----开放获取View 联系获取全文

Recommended Citation:
Zhou, SL ,Fu, YQ ,Tang, XP ,et al. Fourier-based analysis of moire fringe patterns of superposed gratings in alignment of nanolithography[J]. OPTICS EXPRESS,2008,16(11):7869-7880 MAY 26.
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Zhou, SL (Zhou, Shaolin)]'s Articles
[Fu, YQ (Fu, Yongqi)]'s Articles
[Tang, XP (Tang, Xiaoping)]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Zhou, SL (Zhou, Shaolin)]‘s Articles
[Fu, YQ (Fu, Yongqi)]‘s Articles
[Tang, XP (Tang, Xiaoping)]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
文件名: 2008-210.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2016  中国科学院光电技术研究所 - Feedback
Powered by CSpace