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Far-infrared Fizeau interferometer for large aspheric mirror
Yongqian Wu and Yudong Zhang
Volume7282
2008
Language英语
ISSN0361-0785
Indexed By其他
Subtype会议论文
AbstractThe design and system performance of a far-infrared interferometer with which to test rough aspheric surfaces are presented. It is based on the optical configuration of classical Fizeau interferometer. A CO2 laser is used as a light source operating at a 10.6μm wavelength. A He-Ne laser is introduced into the interferometer to solve problems concerning with alignment. The measuring error(RMS) of the interferometer is less than λ/200 (λ=10.6μm), this accuracy is able to fulfill the need of grinding primary mirror.
Conference NamePROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/1864
Collection先光中心
Recommended Citation
GB/T 7714
Yongqian Wu and Yudong Zhang. Far-infrared Fizeau interferometer for large aspheric mirror[C],2008.
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