| Characterizations of microcantilever chemical sensors based on SOI material - art. no. 68360S | |
| Hu, FR; Wang, DJ; Qiu, CK; et al. | |
| Volume | 6836 |
| Pages | S8360-S8360 |
| 2008 | |
| Language | 英语 |
| ISSN | 0361-0756 |
| Indexed By | Ei |
| Subtype | 会议论文 |
| Abstract | This paper focuses on the study of sensitivities of microcantilever chemical sensors based on SOI POLYMUMPS process. Through changing the geometry of beams and analyzing resonance frequency shift in a dynamic mode by using FEA (finite element analysis) method, the most sensitive structure, which is a triangle, is selected out from various kinds of beam designs. The relation between the sensitivity and the parameters such as length L, width W and thickness t is obtained by dynamic analyzing with the commercial software Intellisuite. This research provides the primary instruction for developing high sensitive multi-array biochips aiming at analyzing multiple parameters in parallel. |
| Conference Name | PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE) |
| Document Type | 会议论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/1851 |
| Collection | 微细加工光学技术国家重点实验室（开放室） |
| Recommended Citation GB/T 7714 | Hu, FR,Wang, DJ,Qiu, CK,et al. Characterizations of microcantilever chemical sensors based on SOI material - art. no. 68360S[C],2008:S8360-S8360. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2008-096.pdf（357KB） | 开放获取 | CC BY-NC-ND | Application Full Text | |||
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