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Characterizations of microcantilever chemical sensors based on SOI material - art. no. 68360S
Hu, FR; Wang, DJ; Qiu, CK; et al.
Volume6836
PagesS8360-S8360
2008
Language英语
ISSN0361-0756
Indexed ByEi
Subtype会议论文
AbstractThis paper focuses on the study of sensitivities of microcantilever chemical sensors based on SOI POLYMUMPS process. Through changing the geometry of beams and analyzing resonance frequency shift in a dynamic mode by using FEA (finite element analysis) method, the most sensitive structure, which is a triangle, is selected out from various kinds of beam designs. The relation between the sensitivity and the parameters such as length L, width W and thickness t is obtained by dynamic analyzing with the commercial software Intellisuite. This research provides the primary instruction for developing high sensitive multi-array biochips aiming at analyzing multiple parameters in parallel.
Conference NamePROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)
Document Type会议论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/1851
Collection微细加工光学技术国家重点实验室(开放室)
Recommended Citation
GB/T 7714
Hu, FR,Wang, DJ,Qiu, CK,et al. Characterizations of microcantilever chemical sensors based on SOI material - art. no. 68360S[C],2008:S8360-S8360.
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