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题名:
Characterizations of microcantilever chemical sensors based on SOI material - art. no. 68360S
作者: Hu, FR ; Wang, DJ ; Qiu, CK ; et al.
出版日期: 2008
会议名称: PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)
学科分类: 微细加工技术
中文摘要: This paper focuses on the study of sensitivities of microcantilever chemical sensors based on SOI POLYMUMPS process. Through changing the geometry of beams and analyzing resonance frequency shift in a dynamic mode by using FEA (finite element analysis) method, the most sensitive structure, which is a triangle, is selected out from various kinds of beam designs. The relation between the sensitivity and the parameters such as length L, width W and thickness t is obtained by dynamic analyzing with the commercial software Intellisuite. This research provides the primary instruction for developing high sensitive multi-array biochips aiming at analyzing multiple parameters in parallel.
收录类别: Ei
语种: 英语
卷号: 6836
ISSN号: 0361-0756
文章类型: 会议论文
页码: S8360-S8360
内容类型: 会议论文
URI标识: http://ir.ioe.ac.cn/handle/181551/1851
Appears in Collections:微细加工光学技术国家重点实验室(开放室)_会议论文

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Recommended Citation:
Hu, FR,Wang, DJ,Qiu, CK,et al. Characterizations of microcantilever chemical sensors based on SOI material - art. no. 68360S[C]. 见:PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE).
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文件名: 2008-096.pdf
格式: Adobe PDF
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