| 题名: | Characterizations of microcantilever chemical sensors based on SOI material - art. no. 68360S |
| 作者: | Hu, FR
; Wang, DJ
; Qiu, CK
; et al.
|
| 出版日期: | 2008
|
| 会议名称: | PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)
|
| 学科分类: | 微细加工技术
|
| 中文摘要: | This paper focuses on the study of sensitivities of microcantilever chemical sensors based on SOI POLYMUMPS process. Through changing the geometry of beams and analyzing resonance frequency shift in a dynamic mode by using FEA (finite element analysis) method, the most sensitive structure, which is a triangle, is selected out from various kinds of beam designs. The relation between the sensitivity and the parameters such as length L, width W and thickness t is obtained by dynamic analyzing with the commercial software Intellisuite. This research provides the primary instruction for developing high sensitive multi-array biochips aiming at analyzing multiple parameters in parallel. |
| 收录类别: | Ei
|
| 语种: | 英语
|
| 卷号: | 6836
|
| ISSN号: | 0361-0756
|
| 文章类型: | 会议论文
|
| 页码: | S8360-S8360
|
| 内容类型: | 会议论文
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| URI标识: | http://ir.ioe.ac.cn/handle/181551/1851
|
| Appears in Collections: | 微细加工光学技术国家重点实验室（开放室）_会议论文
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| 2008-096.pdf（357KB） | -- | -- | 限制开放 | | View
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| Recommended Citation: | |
Hu, FR,Wang, DJ,Qiu, CK,et al. Characterizations of microcantilever chemical sensors based on SOI material - art. no. 68360S[C]. 见:PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE).
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