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Fabrication of nanoimprint stamp using interference lithography
Chen, XZ; Li, HY
Source PublicationCHINESE PHYSICS LETTERS
Volume24Pages:2830-2832
2007
Language英语
Indexed BySCI
Subtype期刊论文
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/1734
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding AuthorChen, XZ
Recommended Citation
GB/T 7714
Chen, XZ,Li, HY. Fabrication of nanoimprint stamp using interference lithography[J]. CHINESE PHYSICS LETTERS,2007,24:2830-2832.
APA Chen, XZ,&Li, HY.(2007).Fabrication of nanoimprint stamp using interference lithography.CHINESE PHYSICS LETTERS,24,2830-2832.
MLA Chen, XZ,et al."Fabrication of nanoimprint stamp using interference lithography".CHINESE PHYSICS LETTERS 24(2007):2830-2832.
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