IOE OpenIR  > 微电子装备总体研究室(四室)
工件台移动直线性对掩模移动曝光的影响
佟军民; 胡松; 董小春; 严伟; 余国彬
Source Publication光电工程
Volume34Issue:11Pages:55-60
2007
Language中文
Indexed ByEi
Subtype期刊论文
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/1648
Collection微电子装备总体研究室(四室)
Corresponding Author佟军民
Recommended Citation
GB/T 7714
佟军民,胡松,董小春,等. 工件台移动直线性对掩模移动曝光的影响[J]. 光电工程,2007,34(11):55-60.
APA 佟军民,胡松,董小春,严伟,&余国彬.(2007).工件台移动直线性对掩模移动曝光的影响.光电工程,34(11),55-60.
MLA 佟军民,et al."工件台移动直线性对掩模移动曝光的影响".光电工程 34.11(2007):55-60.
Files in This Item:
File Name/Size DocType Version Access License
7085.pdf(779KB) 开放获取CC BY-NC-NDView Application Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[佟军民]'s Articles
[胡松]'s Articles
[董小春]'s Articles
Baidu academic
Similar articles in Baidu academic
[佟军民]'s Articles
[胡松]'s Articles
[董小春]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[佟军民]'s Articles
[胡松]'s Articles
[董小春]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: 7085.pdf
Format: Adobe PDF
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.