| 电子束曝光机激光工件台系统研制 | |
| 乔俊仙 | |
| Source Publication | 微纳电子技术
 |
| Volume | 91Issue:2Pages:~ |
| 2006 | |
| Language | 中文 |
| Indexed By | CSCD |
| Subtype | 期刊论文 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/1454 |
| Collection | 微电子装备总体研究室（四室） |
| Corresponding Author | 乔俊仙 |
| Recommended Citation GB/T 7714 | 乔俊仙. 电子束曝光机激光工件台系统研制[J]. 微纳电子技术,2006,91(2):~. |
| APA | 乔俊仙.(2006).电子束曝光机激光工件台系统研制.微纳电子技术,91(2),~. |
| MLA | 乔俊仙."电子束曝光机激光工件台系统研制".微纳电子技术 91.2(2006):~. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 6047.pdf（461KB） | 开放获取 | CC BY-NC-ND | View Application Full Text | |||
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