IOE OpenIR  > 微电子装备总体研究室(四室)
电子束曝光机激光工件台系统研制
乔俊仙
Source Publication微纳电子技术
Volume91Issue:2Pages:~
2006
Language中文
Indexed ByCSCD
Subtype期刊论文
Citation statistics
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/1454
Collection微电子装备总体研究室(四室)
Corresponding Author乔俊仙
Recommended Citation
GB/T 7714
乔俊仙. 电子束曝光机激光工件台系统研制[J]. 微纳电子技术,2006,91(2):~.
APA 乔俊仙.(2006).电子束曝光机激光工件台系统研制.微纳电子技术,91(2),~.
MLA 乔俊仙."电子束曝光机激光工件台系统研制".微纳电子技术 91.2(2006):~.
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