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电光调制技术在光刻对准中的应用
梁友生; 曹益平; 周金梅; 邢廷文
Source Publication微细加工技术
Issue1Pages:22-25
2005
Language中文
Indexed By其他
Subtype期刊论文
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/1348
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding Author梁友生
Recommended Citation
GB/T 7714
梁友生,曹益平,周金梅,等. 电光调制技术在光刻对准中的应用[J]. 微细加工技术,2005(1):22-25.
APA 梁友生,曹益平,周金梅,&邢廷文.(2005).电光调制技术在光刻对准中的应用.微细加工技术(1),22-25.
MLA 梁友生,et al."电光调制技术在光刻对准中的应用".微细加工技术 .1(2005):22-25.
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