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电子束曝光机的一种新型精密工件台结构特点及几何精度分析
乔俊仙; 王肇志; 余国彬
Source Publication电子工业专用设备
Volume34Issue:6Pages:11-13
2005
Language中文
Indexed By其他
Subtype期刊论文
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/1293
Collection微电子装备总体研究室(四室)
Corresponding Author乔俊仙
Recommended Citation
GB/T 7714
乔俊仙,王肇志,余国彬. 电子束曝光机的一种新型精密工件台结构特点及几何精度分析[J]. 电子工业专用设备,2005,34(6):11-13.
APA 乔俊仙,王肇志,&余国彬.(2005).电子束曝光机的一种新型精密工件台结构特点及几何精度分析.电子工业专用设备,34(6),11-13.
MLA 乔俊仙,et al."电子束曝光机的一种新型精密工件台结构特点及几何精度分析".电子工业专用设备 34.6(2005):11-13.
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