IOE OpenIR  > 微电子装备总体研究室(四室)
新型URE-2000S型紫外单、双面深度光刻机研制
马平; 杨春利; 胡松; 赵立新
Source Publication微纳电子技术
Volume42Issue:8Pages:388-391
2005
Language中文
Indexed By其他
Subtype期刊论文
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/1289
Collection微电子装备总体研究室(四室)
Corresponding Author马平
Recommended Citation
GB/T 7714
马平,杨春利,胡松,等. 新型URE-2000S型紫外单、双面深度光刻机研制[J]. 微纳电子技术,2005,42(8):388-391.
APA 马平,杨春利,胡松,&赵立新.(2005).新型URE-2000S型紫外单、双面深度光刻机研制.微纳电子技术,42(8),388-391.
MLA 马平,et al."新型URE-2000S型紫外单、双面深度光刻机研制".微纳电子技术 42.8(2005):388-391.
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