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应力盘智能控制盘面面形的表征方法及检测技术的研究
范斌; 杨力; 曾志革; 李晓今; 邓建明; 万勇建
Source Publication光学技术
Volume31Issue:5Pages:751-753
2005
Language中文
Indexed ByEi
Subtype期刊论文
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/1266
Collection先光中心
Corresponding Author范斌
Recommended Citation
GB/T 7714
范斌,杨力,曾志革,等. 应力盘智能控制盘面面形的表征方法及检测技术的研究[J]. 光学技术,2005,31(5):751-753.
APA 范斌,杨力,曾志革,李晓今,邓建明,&万勇建.(2005).应力盘智能控制盘面面形的表征方法及检测技术的研究.光学技术,31(5),751-753.
MLA 范斌,et al."应力盘智能控制盘面面形的表征方法及检测技术的研究".光学技术 31.5(2005):751-753.
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