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题名:
Absolute subaperture testing by multiangle averaging and Zernike polynomial fitting method
作者: Yan, Fengtao1,2; Fan, Bin1; Hou, Xi1; Wu, Fan1
刊名: OPTICAL ENGINEERING
出版日期: 2013-08-01
卷号: 52, 期号:8
关键词: absolute subaperture testing ; multiangle averaging ; Zernike polynomial fitting
文章类型: Article
英文摘要: A method to obtain the absolute shape of a large plane or sphere surface in the subaperture testing with multiangle averaging and Zernike polynomial fitting method is proposed. The subaperture data obtained by the interferometer contain not only the test mirror deviation but also the reference surface deviation. The reference surface deviation has become the main limit of the subaperture testing accuracy. To correct the deviation, the measurements are made so that the reference deviation could be eliminated by rotational asymmetric deviation and the rotational symmetric deviation. This technique can get not only the full absolute shape of the large mirrors, but also the reference surface shape. Experimental results have been given to verify the effectiveness of this method. (C) 2013 Society of Photo-Optical Instrumentation Engineers (SPIE)
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: STITCHING INTERFEROMETER ; INTERFEROGRAMS ; SURFACES
收录类别: SCI
语种: 英语
WOS记录号: WOS:000324290900026
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/1244
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China

Recommended Citation:
Yan, Fengtao,Fan, Bin,Hou, Xi,et al. Absolute subaperture testing by multiangle averaging and Zernike polynomial fitting method[J]. OPTICAL ENGINEERING,2013,52(8).
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