中国科学院光电技术研究所机构知识库
Advanced  
IOE OpenIR  > 光电技术研究所被WoS收录文章  > 期刊论文
题名:
Absolute measurement of flats with the method of shift-rotation
作者: Song, Weihong1,2; Wu, Fan; Hou, Xi1; Zhao, Wenchuan1; Wan, Yongjian1
刊名: OPTICAL REVIEW
出版日期: 2013-09-01
卷号: 20, 期号:5, 页码:374-377
关键词: absolute measurement ; shift-rotation ; interferometry ; surface measurements
文章类型: Article
英文摘要: We present an absolute measurement of flats in a Fizeau interferometer with the method of shift-rotation, which only requires rotational measurements and shift measurement with a translation. Experiments have been carried out to verify the validity of the absolute testing method, and the results show that the reference surface deviation measured with the shift-rotation method agrees well with that of another calibration result with traditional three-flat absolute procedure; the root-mean-square (RMS) of the residual figure between them is similar to 0.4 nm. (C) 2013 The Japan Society of Applied Physics
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: OPTICAL-SURFACES ; ACCURACY ; MIRROR
收录类别: SCI
语种: 英语
WOS记录号: WOS:000325369000004
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/1239
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

Files in This Item:

There are no files associated with this item.


作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China

Recommended Citation:
Song, Weihong,Wu, Fan,Hou, Xi,et al. Absolute measurement of flats with the method of shift-rotation[J]. OPTICAL REVIEW,2013,20(5):374-377.
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Song, Weihong]'s Articles
[Wu, Fan]'s Articles
[Hou, Xi]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Song, Weihong]‘s Articles
[Wu, Fan]‘s Articles
[Hou, Xi]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2016  中国科学院光电技术研究所 - Feedback
Powered by CSpace