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题名:
Single closed fringe pattern phase demodulation in alignment of nanolithography
作者: Xu, Feng1,2; Hu, Song1; Yang, Yong1; Li, Jinlong1,2; Li, Lanlan1,2
刊名: OPTIK
出版日期: 2013
卷号: 124, 期号:9, 页码:818-823
关键词: Alignment ; Closed fringe ; Phase demodulation ; 2-D wavelet ridge
文章类型: Article
英文摘要: The single closed fringe pattern that occurs in two superposed grating marks applied in the previously designed moire alignment scheme based on dual-grating for lithography is processed and analyzed using a frequency domain method based on two-dimensional (2-D) analytic wavelet transform (AWT) and 2-D wavelet ridge algorithm. The sign ambiguities, which always occur in the process of single closed fringe pattern analysis, are removed through the discontinuities of the angle in the 2-D wavelet ridge. Theoretical analysis regarding application of 2-D AWT and 2-D wavelet ridge to the interference fringe in alignment is performed. Verification of this process is carried out through numerical simulation and experiment. Results indicate that the background and noise in the fringes can be filtered effectively through our method, and the phase information can be obtained successfully. (C) 2012 Elsevier GmbH. All rights reserved.
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: WINDOWED FOURIER-TRANSFORM ; X-RAY-LITHOGRAPHY ; MOIRE FRINGE ; INTERFEROMETRY ; SYSTEM ; EXTRACTION ; ALGORITHM
收录类别: SCI
语种: 英语
WOS记录号: WOS:000318056600010
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/1237
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Chinese Acad Sci, Grad Univ, Beijing 100039, Peoples R China

Recommended Citation:
Xu, Feng,Hu, Song,Yang, Yong,et al. Single closed fringe pattern phase demodulation in alignment of nanolithography[J]. OPTIK,2013,124(9):818-823.
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