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Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements
Guo, Chun1,2; Kong, Mingdong1; Gao, Weidong1; Li, Bincheng1
Source PublicationOPTICS LETTERS
Volume38Issue:1Pages:40-42
2013
Language英语
Indexed BySCI
WOS IDWOS:000312708200014
SubtypeArticle
AbstractA model taking into consideration the refractive index inhomogeneity and surface roughness of a film was proposed for the simultaneous determination of the optical constants, thickness, and surface roughness of a single-layer thin film from spectrophotometric measurements. In the model, the rough surface was treated as an effective absorbing layer. The model was applied to determine simultaneously the parameters of single-layer MgF2 thin films deposited on fused silica substrates by the oblique-angle deposition technique. The film thicknesses and rms surface roughnesses extracted from spectrophotometric measurements with the proposed model were in good agreement with the values measured by a spectroscopic ellipsometer and an atomic force microscope, respectively. (C) 2012 Optical Society of America
WOS KeywordREFRACTIVE-INDEX
WOS Research AreaOptics
WOS SubjectOptics
Citation statistics
Cited Times:12[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/1236
Collection光电技术研究所被WoS收录文章
Affiliation1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China
Recommended Citation
GB/T 7714
Guo, Chun,Kong, Mingdong,Gao, Weidong,et al. Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements[J]. OPTICS LETTERS,2013,38(1):40-42.
APA Guo, Chun,Kong, Mingdong,Gao, Weidong,&Li, Bincheng.(2013).Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements.OPTICS LETTERS,38(1),40-42.
MLA Guo, Chun,et al."Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements".OPTICS LETTERS 38.1(2013):40-42.
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