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题名:
Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements
作者: Guo, Chun1,2; Kong, Mingdong1; Gao, Weidong1; Li, Bincheng1
刊名: OPTICS LETTERS
出版日期: 2013
卷号: 38, 期号:1, 页码:40-42
文章类型: Article
英文摘要: A model taking into consideration the refractive index inhomogeneity and surface roughness of a film was proposed for the simultaneous determination of the optical constants, thickness, and surface roughness of a single-layer thin film from spectrophotometric measurements. In the model, the rough surface was treated as an effective absorbing layer. The model was applied to determine simultaneously the parameters of single-layer MgF2 thin films deposited on fused silica substrates by the oblique-angle deposition technique. The film thicknesses and rms surface roughnesses extracted from spectrophotometric measurements with the proposed model were in good agreement with the values measured by a spectroscopic ellipsometer and an atomic force microscope, respectively. (C) 2012 Optical Society of America
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: REFRACTIVE-INDEX
收录类别: SCI
语种: 英语
WOS记录号: WOS:000312708200014
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/1236
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China

Recommended Citation:
Guo, Chun,Kong, Mingdong,Gao, Weidong,et al. Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements[J]. OPTICS LETTERS,2013,38(1):40-42.
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