Knowledge Management System Of Institute of optics and electronics, CAS
| Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements | |
| Guo, Chun1,2; Kong, Mingdong1; Gao, Weidong1; Li, Bincheng1 | |
| Source Publication | OPTICS LETTERS
 |
| Volume | 38Issue:1Pages:40-42 |
| 2013 | |
| Language | 英语 |
| Indexed By | SCI |
| WOS ID | WOS:000312708200014 |
| Subtype | Article |
| Abstract | A model taking into consideration the refractive index inhomogeneity and surface roughness of a film was proposed for the simultaneous determination of the optical constants, thickness, and surface roughness of a single-layer thin film from spectrophotometric measurements. In the model, the rough surface was treated as an effective absorbing layer. The model was applied to determine simultaneously the parameters of single-layer MgF2 thin films deposited on fused silica substrates by the oblique-angle deposition technique. The film thicknesses and rms surface roughnesses extracted from spectrophotometric measurements with the proposed model were in good agreement with the values measured by a spectroscopic ellipsometer and an atomic force microscope, respectively. (C) 2012 Optical Society of America |
| WOS Keyword | REFRACTIVE-INDEX |
| WOS Research Area | Optics |
| WOS Subject | Optics |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/1236 |
| Collection | 光电技术研究所被WoS收录文章 |
| Affiliation | 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China |
| Recommended Citation GB/T 7714 | Guo, Chun,Kong, Mingdong,Gao, Weidong,et al. Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements[J]. OPTICS LETTERS,2013,38(1):40-42. |
| APA | Guo, Chun,Kong, Mingdong,Gao, Weidong,&Li, Bincheng.(2013).Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements.OPTICS LETTERS,38(1),40-42. |
| MLA | Guo, Chun,et al."Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements".OPTICS LETTERS 38.1(2013):40-42. |
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