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题名:
Subwavelength Demagnification Imaging and Lithography Using Hyperlens with a Plasmonic Reflector Layer
作者: Ren, Guowei; Wang, Changtao; Yi, Guangwei; Tao, Xing; Luo, Xiangang
刊名: PLASMONICS
出版日期: 2013-06-01
卷号: 8, 期号:2, 页码:1065-1072
关键词: Multilayers ; Subwavelength structures ; Metamaterials ; Plasmonics
文章类型: Article
英文摘要: Unlike the case in magnification mode, it is found that hyperlens employed in demagnification and lithography manner encounters great degradation of imaging quality especially for high-resolution image features. This problem mainly arises from the transversal magnetic polarization feature of light which delivers reduced contrast of electronic components intensity profile at the imaging region. Hyperlens with plasmonic reflector layer is designed for subwavelength demagnification imaging and photolithography. Analytical equations and numerical simulations show amplification of reflected evanescent waves in photoresist sandwiched by hyperlens and plasmonic reflectors in cylindrical geometry. The image quality features including resolution, contrast, and intensity can be improved significantly. Also presented are the dependence and influence of geometry parameters on imaging quality. Numerical demonstrations are given with about 15 nm half-pitch resolution imaging at illuminating wavelength of 365 nm.
WOS标题词: Science & Technology ; Physical Sciences ; Technology
类目[WOS]: Chemistry, Physical ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary
研究领域[WOS]: Chemistry ; Science & Technology - Other Topics ; Materials Science
关键词[WOS]: OPTICAL HYPERLENS ; DIFFRACTION LIMIT ; SUPERLENS ; METAL ; LENS
收录类别: SCI
语种: 英语
WOS记录号: WOS:000320445700118
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/1235
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, Chengdu 610209, Peoples R China

Recommended Citation:
Ren, Guowei,Wang, Changtao,Yi, Guangwei,et al. Subwavelength Demagnification Imaging and Lithography Using Hyperlens with a Plasmonic Reflector Layer[J]. PLASMONICS,2013,8(2):1065-1072.
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