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题名:
Carrier Diffusivity Measurement in Silicon Wafers Using Free Carrier Absorption
作者: Zhang, Xiren1,2; Li, Bincheng2
刊名: INTERNATIONAL JOURNAL OF THERMOPHYSICS
出版日期: 2013-09-01
卷号: 34, 期号:8-9, 页码:1721-1726
关键词: Diffusivity ; Free carrier absorption ; Slope ; Semiconductor
文章类型: Article
英文摘要: In this article, it has been shown that the modulated free carrier absorption method (MFCA) can be used to determine unambiguously and without contact the carrier diffusivity of semiconductor wafers. The linear dependence of the phase on the distance of pump and probe beams are investigated with computer simulation, and then it has been found that at high frequency the slope of the MFCA phase versus distance depends solely on the carrier diffusivity. Hence, the carrier diffusivity can be extracted from the slope of the phase versus distance. Experiments were carried out on an -type Si wafer with 7 cm to 10 cm resistivity and (525 20) m thickness. Comparing the experimental fitted results to those by fitting the MFCA amplitude and phase on the pump-probe-beam separation measured at several modulation frequencies to the rigorous three-dimensional carrier diffusion model, the fitted results by both methods agreed well. This shows that the simplified model can be used to determine the carrier diffusivity with high precision.
WOS标题词: Science & Technology ; Physical Sciences ; Technology
类目[WOS]: Thermodynamics ; Chemistry, Physical ; Mechanics ; Physics, Applied
研究领域[WOS]: Thermodynamics ; Chemistry ; Mechanics ; Physics
收录类别: SCI
语种: 英语
WOS记录号: WOS:000325815500045
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/1228
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Univ Elect Sci & Technol China, Sch Optoelect Informat, Chengdu 610054, Peoples R China
2.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China

Recommended Citation:
Zhang, Xiren,Li, Bincheng. Carrier Diffusivity Measurement in Silicon Wafers Using Free Carrier Absorption[J]. INTERNATIONAL JOURNAL OF THERMOPHYSICS,2013,34(8-9):1721-1726.
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