中国科学院光电技术研究所机构知识库
Advanced  
IOE OpenIR  > 光电技术研究所被WoS收录文章  > 期刊论文
题名:
Error compensation of four and five buckets wavefront extraction algorithms in phase-shifting interferometer
作者: Zhu, Mingxin1; Bai, Fuzhong1; Gan, Shiming1; Huang, Kaizheng1; Huang, Linhai2; Wang, Jianxin3
刊名: OPTIK
出版日期: 2013
卷号: 124, 期号:22, 页码:5624-5627
关键词: Phase-shifting algorithm ; Phase extraction ; Phase shift deviation ; Detector nonlinearity
文章类型: Article
英文摘要: The phase-shifting method is all along an important wavefront extraction technique in the interferometer. Moreover, to require almost real-time measurement an algorithm with a small number of grabbed buckets is very helpful to the phase-shifting interferometer. Therefore, those algorithms within five buckets are very practical and are given more attention. In the paper, popular phase shifting algorithms within five buckets are compared and new four and five buckets algorithms are developed to compensate for two dominate error sources which are linear phase shift deviation and detector nonlinearity. Numerical simulations and wavefront extraction experiment verify that the proposed compensation algorithms are insensitive to linear phase shift deviation and detector nonlinearity compared with classical four and five bucket algorithm. (C) 2013 Elsevier GmbH. All rights reserved.
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: STEPPING INTERFEROMETRY ; SURFACES
收录类别: SCI
语种: 英语
WOS记录号: WOS:000325835400074
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/1225
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

Files in This Item:

There are no files associated with this item.


作者单位: 1.Inner Mongolia Univ Technol, Coll Mech Engn, Hohhot 010051, Peoples R China
2.Chinese Acad Sci, Inst Opt & Elect, Lab Adapt Opt, Chengdu 610209, Peoples R China
3.Southwest Univ Sci & Technol, Coll Sci, Mianyang 621010, Peoples R China

Recommended Citation:
Zhu, Mingxin,Bai, Fuzhong,Gan, Shiming,et al. Error compensation of four and five buckets wavefront extraction algorithms in phase-shifting interferometer[J]. OPTIK,2013,124(22):5624-5627.
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Zhu, Mingxin]'s Articles
[Bai, Fuzhong]'s Articles
[Gan, Shiming]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Zhu, Mingxin]‘s Articles
[Bai, Fuzhong]‘s Articles
[Gan, Shiming]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2016  中国科学院光电技术研究所 - Feedback
Powered by CSpace