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题名:
Design and Theoretical Analyses of Tip-Insulator-Metal Structure with Bottom-Up Light Illumination: Formations of Elongated Symmetrical Plasmonic Hot Spot at Sub-10 nm Resolution
作者: Zhou, Jie; Wang, Changtao; Zhao, Zeyu; Wang, Yanqin; He, Jiayu; Tao, Xing; Luo, Xiangang
刊名: PLASMONICS
出版日期: 2013-06-01
卷号: 8, 期号:2, 页码:1073-1078
关键词: Plasmonics ; Surface plasmons ; Nano-lithography ; Laser material processing
文章类型: Article
英文摘要: Ag tip-insulator-metal structure with bottom-up light illumination is proposed and theoretically analyzed. It shows that there is a strong plasmonic coupling between Ag tip and metallic surface. Different from oblique light illumination, this novel design possesses unique advantages of symmetrical hot spot profile and enlarged depth of focus at a sub-10-nm spatial resolution. Influences of tip size, insulator, and metallic layer thickness are studied. It is found that the metallic layer thickness greatly affects the plasmonic hot spot quality. Meanwhile, the thickness of photoresist plays a major role in controlling light spot size, indicating that much higher resolution can be achieved for the Ag tips with large curvature radius.
WOS标题词: Science & Technology ; Physical Sciences ; Technology
类目[WOS]: Chemistry, Physical ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary
研究领域[WOS]: Chemistry ; Science & Technology - Other Topics ; Materials Science
关键词[WOS]: NEAR-FIELD ; PROBE ; NANOLITHOGRAPHY ; LITHOGRAPHY ; ENHANCEMENT ; APERTURE ; LENS
收录类别: SCI
语种: 英语
WOS记录号: WOS:000320445700119
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/1215
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, Chengdu 610209, Peoples R China

Recommended Citation:
Zhou, Jie,Wang, Changtao,Zhao, Zeyu,et al. Design and Theoretical Analyses of Tip-Insulator-Metal Structure with Bottom-Up Light Illumination: Formations of Elongated Symmetrical Plasmonic Hot Spot at Sub-10 nm Resolution[J]. PLASMONICS,2013,8(2):1073-1078.
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