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题名:
Absolute calibration of a spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm
作者: Song, Weihong1,2; Wu, Fan1; Hou, Xi1; Wu, Gaofeng1,2; Liu, Bin1; Wan, Yongjian1
刊名: OPTICAL ENGINEERING
出版日期: 2013-03-01
卷号: 52, 期号:3
关键词: interferometry ; surface metrology ; absolute measurement ; shift rotation
文章类型: Article
英文摘要: We present an absolute testing of a spherical reference surface of a Fizeau interferometer with the method of shift-rotation, which relies on the decomposition of the surface deviation into rotationally asymmetric and symmetric components. With a new procedure to measure the rotationally asymmetric component and an iterative algorithm to calculate the symmetric component, the method can calibrate the spherical reference surface with high accuracy. An experiment is presented to verify the validity of the absolute testing method. The reference surface deviation measured with the absolute testing method agrees well with that of random-ball-averaging testing method; the root mean square of the residual figure between them is similar to 0.8 nm. (C) 2013 Society of Photo-Optical Instrumentation Engineers (SPIE) [DOI: 10.1117/1.OE.52.3.033601]
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: ACCURACY
收录类别: SCI
语种: 英语
WOS记录号: WOS:000318248000011
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/1202
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China

Recommended Citation:
Song, Weihong,Wu, Fan,Hou, Xi,et al. Absolute calibration of a spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm[J]. OPTICAL ENGINEERING,2013,52(3).
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