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题名:
Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition
作者: Guo, Chun1,2; Kong, Mingdong1; Lin, Dawei1; Liu, Cunding1; Li, Bincheng1
刊名: OPTICS EXPRESS
出版日期: 2013-01-14
卷号: 21, 期号:1, 页码:960-967
文章类型: Article
英文摘要: Magnesium fluoride (MgF2) films deposited by resistive heating evaporation with oblique-angle deposition have been investigated in details. The optical and micro-structural properties of single-layer MgF2 films were characterized by UV-VIS and FTIR spectrophotometers, scanning electron microscope (SEM), atomic force microscope (AFM), and x-ray diffraction (XRD), respectively. The dependences of the optical and micro-structural parameters of the thin films on the deposition angle were analyzed. It was found that the MgF2 film in a columnar microstructure was negatively inhomogeneous of refractive index and polycrystalline. As the deposition angle increased, the optical loss, extinction coefficient, root-mean-square (rms) roughness, dislocation density and columnar angle of the MgF2 films increased, while the refractive index, packing density and grain size decreased. Furthermore, IR absorption of the MgF2 films depended on the columnar structured growth. (C) 2013 Optical Society of America
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: THIN-FILMS ; EVAPORATION ; GROWTH
收录类别: SCI
语种: 英语
WOS记录号: WOS:000315988100120
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/1196
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Chinese Acad Sci, Grad Univ, Beijing 100039, Peoples R China

Recommended Citation:
Guo, Chun,Kong, Mingdong,Lin, Dawei,et al. Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition[J]. OPTICS EXPRESS,2013,21(1):960-967.
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