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题名:
Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method
作者: Song, W.1,2; Hou, X.1; Wu, F.1; Wan, Y.1
刊名: APPLIED OPTICS
出版日期: 2013-08-20
卷号: 52, 期号:24, 页码:5974-5978
文章类型: Article
英文摘要: Absolute testing methods are commonly employed in surface metrology to calibrate the reference surface deviation and obtain the absolute deviation of the surface under test. A simple and reliable datareduction method of absolute shift-rotation method with rotational and translational measurements is presented here, which relies on the decomposition of the surface deviation into rotationally asymmetric and symmetric components. The rotationally asymmetric surface deviation can be simply obtained by classical N-position averaging method. After that, the two-dimensional problem of estimating the other rotationally symmetric surface deviation can be simplified to a one-dimensional problem, and it can be directly calculated out with pixel-level spatial frequency based on several measurements of different translations in one same direction. Since that no orthogonal polynomials fitting, such as Zernike polynomials, is required in the calculation, the data reduction of the method is simple and rapid. Experimental absolute results of spherical surfaces are given. (C) 2013 Optical Society of America
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: SURFACE ; INTERFEROMETER ; CALIBRATION ; ACCURACY ; MIRROR
收录类别: SCI
语种: 英语
WOS记录号: WOS:000323881400016
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/1195
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China

Recommended Citation:
Song, W.,Hou, X.,Wu, F.,et al. Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method[J]. APPLIED OPTICS,2013,52(24):5974-5978.
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