IOE OpenIR  > 光电技术研究所被WoS收录文章
Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method
Song, W.1,2; Hou, X.1; Wu, F.1; Wan, Y.1
Source PublicationAPPLIED OPTICS
Volume52Issue:24Pages:5974-5978
2013-08-20
Language英语
Indexed BySCI
WOS IDWOS:000323881400016
SubtypeArticle
AbstractAbsolute testing methods are commonly employed in surface metrology to calibrate the reference surface deviation and obtain the absolute deviation of the surface under test. A simple and reliable datareduction method of absolute shift-rotation method with rotational and translational measurements is presented here, which relies on the decomposition of the surface deviation into rotationally asymmetric and symmetric components. The rotationally asymmetric surface deviation can be simply obtained by classical N-position averaging method. After that, the two-dimensional problem of estimating the other rotationally symmetric surface deviation can be simplified to a one-dimensional problem, and it can be directly calculated out with pixel-level spatial frequency based on several measurements of different translations in one same direction. Since that no orthogonal polynomials fitting, such as Zernike polynomials, is required in the calculation, the data reduction of the method is simple and rapid. Experimental absolute results of spherical surfaces are given. (C) 2013 Optical Society of America
WOS KeywordSURFACE ; INTERFEROMETER ; CALIBRATION ; ACCURACY ; MIRROR
WOS Research AreaOptics
WOS SubjectOptics
Citation statistics
Cited Times:6[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/1195
Collection光电技术研究所被WoS收录文章
Affiliation1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China
Recommended Citation
GB/T 7714
Song, W.,Hou, X.,Wu, F.,et al. Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method[J]. APPLIED OPTICS,2013,52(24):5974-5978.
APA Song, W.,Hou, X.,Wu, F.,&Wan, Y..(2013).Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method.APPLIED OPTICS,52(24),5974-5978.
MLA Song, W.,et al."Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method".APPLIED OPTICS 52.24(2013):5974-5978.
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