IOE OpenIR  > 光电技术研究所博硕士论文
光刻机对准数据的校正方法研究
Alternative TitleThe Study of Adjustment Approach about the Stepper's Alignment Data
郭黎
Subtype硕士
Thesis Advisor江天水
1996-06
Degree Grantor中国科学院光电技术研究所
Place of Conferral中国科学院光电技术研究所
Keyword分步重复投影光刻机 掩模对准 基准校正 对准
Pages77
Language中文
Document Type学位论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/119
Collection光电技术研究所博硕士论文
Recommended Citation
GB/T 7714
郭黎. 光刻机对准数据的校正方法研究[D]. 中国科学院光电技术研究所. 中国科学院光电技术研究所,1996.
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