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题名:
Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system
作者: Guo, Chun1,2; Kong, Mingdong1; Liu, Cunding1; Li, Bincheng1
刊名: APPLIED OPTICS
出版日期: 2013-02-01
卷号: 52, 期号:4, 页码:B26-B32
文章类型: Article
英文摘要: For a coating machine with a planetary rotation system and counterrotating shadowing mask configuration, a shadowing mask was designed using a numerical optimization algorithm to control the thickness uniformity of optical coatings formed on conical substrate. Single-layer magnesium fluoride (MgF2) and antireflective (AR) coating at 193 nm were fabricated on a convex conical substrate holder (with diameter 225 mm, apex angle 140 deg, and height 41 mm) by thermal evaporation. Thickness distribution determined from the transmittance spectra of single-layer MgF2 thin films on BK7 slices showed that uniformities better than 99.3% were experimentally achieved with the designed counterrotating shadowing mask. From the reflectance spectra, uniform optical performance was also obtained for the 193 nm AR coating deposited on fused-silica substrates. (C) 2013 Optical Society of America
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: THIN-FILMS ; TECHNOLOGY ; DEPOSITION ; VACUUM
收录类别: SCI
语种: 英语
WOS记录号: WOS:000314684600005
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/1183
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China

Recommended Citation:
Guo, Chun,Kong, Mingdong,Liu, Cunding,et al. Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system[J]. APPLIED OPTICS,2013,52(4):B26-B32.
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