IOE OpenIR  > 光电技术研究所被WoS收录文章
Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system
Guo, Chun1,2; Kong, Mingdong1; Liu, Cunding1; Li, Bincheng1
Source PublicationAPPLIED OPTICS
Volume52Issue:4Pages:B26-B32
2013-02-01
Language英语
Indexed BySCI
WOS IDWOS:000314684600005
SubtypeArticle
AbstractFor a coating machine with a planetary rotation system and counterrotating shadowing mask configuration, a shadowing mask was designed using a numerical optimization algorithm to control the thickness uniformity of optical coatings formed on conical substrate. Single-layer magnesium fluoride (MgF2) and antireflective (AR) coating at 193 nm were fabricated on a convex conical substrate holder (with diameter 225 mm, apex angle 140 deg, and height 41 mm) by thermal evaporation. Thickness distribution determined from the transmittance spectra of single-layer MgF2 thin films on BK7 slices showed that uniformities better than 99.3% were experimentally achieved with the designed counterrotating shadowing mask. From the reflectance spectra, uniform optical performance was also obtained for the 193 nm AR coating deposited on fused-silica substrates. (C) 2013 Optical Society of America
WOS KeywordTHIN-FILMS ; TECHNOLOGY ; DEPOSITION ; VACUUM
WOS Research AreaOptics
WOS SubjectOptics
Citation statistics
Cited Times:12[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/1183
Collection光电技术研究所被WoS收录文章
Affiliation1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China
Recommended Citation
GB/T 7714
Guo, Chun,Kong, Mingdong,Liu, Cunding,et al. Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system[J]. APPLIED OPTICS,2013,52(4):B26-B32.
APA Guo, Chun,Kong, Mingdong,Liu, Cunding,&Li, Bincheng.(2013).Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system.APPLIED OPTICS,52(4),B26-B32.
MLA Guo, Chun,et al."Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system".APPLIED OPTICS 52.4(2013):B26-B32.
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