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题名:
A Bi-Directional Out-of-Plane Actuator by Electrostatic Force
作者: Ren, Hao1; Wang, Weimin2; Tao, Fenggang2; Yao, Jun2
刊名: MICROMACHINES
出版日期: 2013-12-01
卷号: 4, 期号:4, 页码:431-443
关键词: MEMS ; out-of-plane actuator ; electrostatic repulsive force ; bi-directional ; microfabrication ; adaptive optics
文章类型: Article
英文摘要: Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the electrostatic repulsive principle and the electrostatic attractive principle. By taking advantage of the electrostatic repulsive mode, the common "pull-in" instability can be lessened to enlarge the displacement, and by applying the electrostatic attractive mode, the out-of-plane displacement is further enlarged. The implications of changing the actuator's physical dimensions are discussed, along with the two-layer polysilicon surface microfabrication process used to fabricate such an actuator. The static characteristics of the out-of-plane displacement versus the voltage of both modes are tested, and displacements of 1.4 mu m and 0.63 mu m are obtained at 130 V and 15 V, respectively. Therefore, a total stroke of 2.03 mu m is achieved, more than 3 fold that of the electrostatic attractive mode, making this actuator useful in optical Micro-Electro-Mechanical Systems (MEMS) and Radio Frequency (RF) MEMS applications.
WOS标题词: Science & Technology ; Technology
类目[WOS]: Nanoscience & Nanotechnology ; Instruments & Instrumentation
研究领域[WOS]: Science & Technology - Other Topics ; Instruments & Instrumentation
关键词[WOS]: LARGE-SCAN-ANGLE ; ADAPTIVE OPTICS ; DESIGN ; MIRROR ; MICROACTUATORS ; MICROMIRROR ; FABRICATION ; DRIVEN ; PLATE ; ARRAY
收录类别: SCI
语种: 英语
WOS记录号: WOS:000329707400006
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/1176
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Arizona State Univ, Sch Elect Comp & Energy Engn, Tempe, AZ 85287 USA
2.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China

Recommended Citation:
Ren, Hao,Wang, Weimin,Tao, Fenggang,et al. A Bi-Directional Out-of-Plane Actuator by Electrostatic Force[J]. MICROMACHINES,2013,4(4):431-443.
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