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Moire-Based Phase Imaging for Sensing and Adjustment of In-Plane Twist Angle
Zhou, Shaolin1,2; Xie, Changqing3; Yang, Yong4; Hu, Song4; Xu, Xiangmin5; Yang, Jun2
Source PublicationIEEE PHOTONICS TECHNOLOGY LETTERS
Volume25Issue:18Pages:1847-1850
2013-09-15
Language英语
Indexed BySCI
WOS IDWOS:000324335500010
SubtypeArticle
AbstractWe explore the feasibility of a controllable and easy-to-implement moire-based phase-sensitive imaging scheme for in-plane twist angle sensing and adjustment between two parallel planes, e.g., the optical alignment in nanoimprint lithography, photolithography, and X-ray lithography. The fundamental derivation of in-plane twist angle detection is given. Any angle variations can be readily sensed and monitored by the phase shift of optical field that occurs at the surface of two overlapped gratings. The performances of a circular grating and a specially designed composite linear grating were tested. Computational and experimental results show that the in-plane twist angle can be readily sensed and remedied within the magnitude of 10(-4) rad even in a manual operation mode by this method.
KeywordOptical Sensing Coherent Imaging Diffraction Optical Alignment Lithography
WOS KeywordX-RAY-LITHOGRAPHY ; ALIGNMENT TECHNIQUE ; SYSTEM
WOS Research AreaEngineering ; Optics ; Physics
WOS SubjectEngineering, Electrical & Electronic ; Optics ; Physics, Applied
Citation statistics
Cited Times:10[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/1168
Collection光电技术研究所被WoS收录文章
Affiliation1.S China Univ Technol, Sch Elect & Informat Engn, London, ON N6A 5B9, Canada
2.Univ Western Ontario, Dept Mech & Mat Engn, London, ON N6A 5B9, Canada
3.Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China
4.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China
5.S China Univ Technol, Sch Elect & Informat Engn, Guangzhou 510641, Peoples R China
Recommended Citation
GB/T 7714
Zhou, Shaolin,Xie, Changqing,Yang, Yong,et al. Moire-Based Phase Imaging for Sensing and Adjustment of In-Plane Twist Angle[J]. IEEE PHOTONICS TECHNOLOGY LETTERS,2013,25(18):1847-1850.
APA Zhou, Shaolin,Xie, Changqing,Yang, Yong,Hu, Song,Xu, Xiangmin,&Yang, Jun.(2013).Moire-Based Phase Imaging for Sensing and Adjustment of In-Plane Twist Angle.IEEE PHOTONICS TECHNOLOGY LETTERS,25(18),1847-1850.
MLA Zhou, Shaolin,et al."Moire-Based Phase Imaging for Sensing and Adjustment of In-Plane Twist Angle".IEEE PHOTONICS TECHNOLOGY LETTERS 25.18(2013):1847-1850.
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