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题名:
Moire-Based Phase Imaging for Sensing and Adjustment of In-Plane Twist Angle
作者: Zhou, Shaolin1,2; Xie, Changqing3; Yang, Yong4; Hu, Song4; Xu, Xiangmin5; Yang, Jun2
刊名: IEEE PHOTONICS TECHNOLOGY LETTERS
出版日期: 2013-09-15
卷号: 25, 期号:18, 页码:1847-1850
关键词: Optical sensing ; coherent imaging ; diffraction optical alignment ; lithography
文章类型: Article
英文摘要: We explore the feasibility of a controllable and easy-to-implement moire-based phase-sensitive imaging scheme for in-plane twist angle sensing and adjustment between two parallel planes, e.g., the optical alignment in nanoimprint lithography, photolithography, and X-ray lithography. The fundamental derivation of in-plane twist angle detection is given. Any angle variations can be readily sensed and monitored by the phase shift of optical field that occurs at the surface of two overlapped gratings. The performances of a circular grating and a specially designed composite linear grating were tested. Computational and experimental results show that the in-plane twist angle can be readily sensed and remedied within the magnitude of 10(-4) rad even in a manual operation mode by this method.
WOS标题词: Science & Technology ; Technology ; Physical Sciences
类目[WOS]: Engineering, Electrical & Electronic ; Optics ; Physics, Applied
研究领域[WOS]: Engineering ; Optics ; Physics
关键词[WOS]: X-RAY-LITHOGRAPHY ; ALIGNMENT TECHNIQUE ; SYSTEM
收录类别: SCI
语种: 英语
WOS记录号: WOS:000324335500010
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/1168
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.S China Univ Technol, Sch Elect & Informat Engn, London, ON N6A 5B9, Canada
2.Univ Western Ontario, Dept Mech & Mat Engn, London, ON N6A 5B9, Canada
3.Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China
4.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China
5.S China Univ Technol, Sch Elect & Informat Engn, Guangzhou 510641, Peoples R China

Recommended Citation:
Zhou, Shaolin,Xie, Changqing,Yang, Yong,et al. Moire-Based Phase Imaging for Sensing and Adjustment of In-Plane Twist Angle[J]. IEEE PHOTONICS TECHNOLOGY LETTERS,2013,25(18):1847-1850.
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