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题名:
Optimized absolute testing method of shift-rotation
作者: Song, Weihong1,2; Wu, Fan1; Hou, Xi1; Wan, Yongjian1
刊名: APPLIED OPTICS
出版日期: 2013-10-01
卷号: 52, 期号:28, 页码:7028-7032
文章类型: Article
英文摘要: The absolute testing method of shift-rotation that combines the traditional N-position method and Zernike polynomial fitting has been commonly employed in surface metrology. It preserves the high spatial frequency of the surface deviation with the N-position method to obtain the rotationally asymmetric surface deviation, but it suffers the kN theta order angular terms errors missed by the N-position method when it calculates the rotationally symmetric surface deviation with the Zernike rotationally symmetric polynomial fitting method. An optimized absolute testing method of shift-rotation is presented in this paper. It considers the missing kN theta order errors when the equations of the rotationally symmetric surface deviation are solved. As a result, it is more accurate than the traditional method. Experimental absolute results of spherical surfaces are given. (C) 2013 Optical Society of America
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: SURFACE ; INTERFEROMETER ; ACCURACY
收录类别: SCI
语种: 英语
WOS记录号: WOS:000325216900021
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/1162
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China

Recommended Citation:
Song, Weihong,Wu, Fan,Hou, Xi,et al. Optimized absolute testing method of shift-rotation[J]. APPLIED OPTICS,2013,52(28):7028-7032.
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