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Optimized absolute testing method of shift-rotation
Song, Weihong1,2; Wu, Fan1; Hou, Xi1; Wan, Yongjian1
Source PublicationAPPLIED OPTICS
Volume52Issue:28Pages:7028-7032
2013-10-01
Language英语
Indexed BySCI
WOS IDWOS:000325216900021
SubtypeArticle
AbstractThe absolute testing method of shift-rotation that combines the traditional N-position method and Zernike polynomial fitting has been commonly employed in surface metrology. It preserves the high spatial frequency of the surface deviation with the N-position method to obtain the rotationally asymmetric surface deviation, but it suffers the kN theta order angular terms errors missed by the N-position method when it calculates the rotationally symmetric surface deviation with the Zernike rotationally symmetric polynomial fitting method. An optimized absolute testing method of shift-rotation is presented in this paper. It considers the missing kN theta order errors when the equations of the rotationally symmetric surface deviation are solved. As a result, it is more accurate than the traditional method. Experimental absolute results of spherical surfaces are given. (C) 2013 Optical Society of America
WOS KeywordSURFACE ; INTERFEROMETER ; ACCURACY
WOS Research AreaOptics
WOS SubjectOptics
Citation statistics
Cited Times:8[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/1162
Collection光电技术研究所被WoS收录文章
Affiliation1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China
Recommended Citation
GB/T 7714
Song, Weihong,Wu, Fan,Hou, Xi,et al. Optimized absolute testing method of shift-rotation[J]. APPLIED OPTICS,2013,52(28):7028-7032.
APA Song, Weihong,Wu, Fan,Hou, Xi,&Wan, Yongjian.(2013).Optimized absolute testing method of shift-rotation.APPLIED OPTICS,52(28),7028-7032.
MLA Song, Weihong,et al."Optimized absolute testing method of shift-rotation".APPLIED OPTICS 52.28(2013):7028-7032.
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